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Full set of calibration standards for SPM lateral and vertical calibration, detection of lateral non-linearity, hysteresis, creep, and cross-coupling effects, determination of the tip shape.
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Calibration grating TGQ1 is intended for simultaneous calibration in X,Y,and Z directions. |
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Test grating TGT1 is intended for for 3-D visualization of the scanning tip, determination of tip sharpness parameters, tip degradation and contamination control. |
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Calibration grating TGZ1 for SPM Z-axis calibration (step height 21,6±1.5nm). |
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Calibration grating TGZ2 for SPM Z-axis calibration (step height 107±2 nm). |
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Calibration grating TGZ3 for SPM Z-axis calibration (step height 560±4 nm). |
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Calibration grating TGZ4 for SPM Z-axis calibration (step height 1317±10 nm). |
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Test grating TGG1 is intended for SPM calibration in X or Y axis, detection of lateral and vertical scanner nonlinearity, detection of angular distortion, tip characterization. |
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Test grating TGX1 is intended for lateral calibration of SPM scanners, detection of lateral non-linearity, hysteresis, creep, and cross-coupling effects, determination of the tip aspect ratio. |
